{"product_id":"9780071627924","title":"Advanced MEMS Packaging","description":"A comprehensive guide to 3D MEMS packaging methods and solutions  \u003cp\u003eWritten by experts in the field, \u003ci\u003eAdvanced MEMS Packaging\u003c\/i\u003e serves as a valuable reference for those faced with the challenges created by the ever-increasing interest in MEMS devices and packaging. This authoritative guide presents cutting-edge MEMS (microelectromechanical systems) packaging techniques, such as low-temperature C2W and W2W bonding and 3D packaging.\u003c\/p\u003e  \u003cp\u003eThis definitive resource helps you select reliable, creative, high-performance, robust, and cost-effective packaging techniques for MEMS devices. The book will also aid in stimulating further research and development in electrical, optical, mechanical, and thermal designs as well as materials, processes, manufacturing, testing, and reliability. Among the topics explored:\u003c\/p\u003e  \u003cul\u003e \u003cli\u003eAdvanced IC and MEMS packaging trends\u003c\/li\u003e  \u003cli\u003eMEMS devices, commercial applications, and markets\u003c\/li\u003e  \u003cli\u003eMore than 360 MEMS packaging patents and 10 3D MEMS packaging designs\u003c\/li\u003e  \u003cli\u003eTSV for 3D MEMS packaging\u003c\/li\u003e  \u003cli\u003eMEMS wafer thinning, dicing, and handling\u003c\/li\u003e  \u003cli\u003eLow-temperature C2C, C2W, and W2W bonding\u003c\/li\u003e  \u003cli\u003eReliability of RoHS-compliant MEMS packaging\u003c\/li\u003e  \u003cli\u003eMicromachining and water bonding techniques\u003c\/li\u003e  \u003cli\u003eActuation mechanisms and integrated micromachining\u003c\/li\u003e  \u003cli\u003eBubble switch, optical switch, and VOA MEMS packaging\u003c\/li\u003e  \u003cli\u003eBolometer and accelerameter MEMS packaging\u003c\/li\u003e  \u003cli\u003eBio-MEMS and biosensor MEMS packaging\u003c\/li\u003e  \u003cli\u003eRF MEMS switches, tunable circuits, and packaging\u003c\/li\u003e  \u003c\/ul\u003e","brand":"McGraw Hill LLC","offers":[{"title":"Default Title","offer_id":47076900798704,"sku":"9780071627924","price":161.1,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0737\/7593\/9824\/files\/9780071627924_p0.jpg?v=1763635505","url":"https:\/\/shop-qa.barnesandnoble.com\/products\/9780071627924","provider":"Barnes \u0026 Noble (DEV)","version":"1.0","type":"link"}