{"product_id":"9780857098757","title":"Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems","description":"Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next?” and “How do we get there?”\u003cbr\u003e\u003cbr\u003eNanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.\u003cbr\u003e\u003cbr\u003eThis book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his\/her own.\u003cul\u003e\n\u003cli\u003eOutlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions\u003c\/li\u003e\n\u003cli\u003eCovers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography\u003c\/li\u003e\n\u003cli\u003eDescribes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Elsevier Science","offers":[{"title":"Default Title","offer_id":47108136337648,"sku":"9780857098757","price":295.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0737\/7593\/9824\/files\/9780857098757_p0.jpg?v=1763829540","url":"https:\/\/shop-qa.barnesandnoble.com\/products\/9780857098757","provider":"Barnes \u0026 Noble (DEV)","version":"1.0","type":"link"}