{"product_id":"9781580539012","title":"Post-Processing Techniques for Integrated MEMS","description":"\u003cp\u003eThis groundbreaking resource presents cutting-edge post-processing techniques for the monolithic integration of MEMS. You learn how to select MEMS structural layers that can be processed on top of standard pre-fabricated electronics and will optimize the performance and reliability of the MEMS device. Supported with over 240 illustrations, the book details a modular integration process that won't modify the electronics fabrication process or impose any limitation for optimizing the physical properties of the MEMS structural layers.\u003c\/p\u003e","brand":"Artech House, Incorporated","offers":[{"title":"Default Title","offer_id":49787590443248,"sku":"9781580539012","price":109.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/shop-qa.barnesandnoble.com\/products\/9781580539012","provider":"Barnes \u0026 Noble (DEV)","version":"1.0","type":"link"}