Introduction to Microelectromechanical Systems Engineering

Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS — including silicon, polymers and glass and quartz substrates — as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using techniques such as oxidation, lithography, chemical vapor deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defense.

A unique element of this book is its look at the future of MEMS – its potential for microelectrode arrays, actuators and optical switches and other technologies. It is a unique, first-of-its-kind resource that will appeal to managers, consultants and engineers looking to understand and exploit the commercial potential of MEMS, as well as university professors and graduate students.